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先进封装用靶材

8~12寸先进封装用靶材

 

Material

Purity

Configurations

Al & Al alloy

5N, 5N5

NMC

Oerlikon (Balzer) TM

NEXX TM

Aviza (Trikon) TM

Tango TM

AMAT TM

Cu

4N5,5N, 6N

CuP

3N5, 4N5,5N

Ti

4N5, 5N

Ni

4N, 4N5

NiV, NiPt

3N5,4N

WTi

3N5,4N,4N5

Ag

4N,5N

Au

4N, 5N

Pt

4N,5N