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芯片制造用靶材

4~12寸芯片制造用靶材

Material

Purity

Configurations

Al & Al alloy

5N, 5N5

Varian TM , MRC TM , KDF TM,

ANELVA TM , ULVAC TM

Oerlikon (Balzer) TM ,

AMAT TM , Novellus TM , etc

 Other configurations available acc. to customer’s specs.

Cu

5N, 6N

Ti

4N5, 5N

Ta

4N, 4N5

Co

5N

NiV

3N5

NiCr

3N5

NiPt

3N5

Cr

3N5, 4N

Mo

3N5

WTi

4N,4N5

Ni

4N, 4N5

Ag

4N, 5N

Au

4N, 5N

Pt

4N