Materials:
Al, Al-30ppmSi, Al-1%Si,
Al-1%Si-0.5%Cu, Al-0.75%Si-0.5%Cu,
Al-0.5%Cu, Al-1%Cu, Al-2%Cu, Al-4%Cu

Purity: 99.999% min.

OEM Configurations:
Varian ConMag I, ConMag II, XM 90, Quantum
Anelva 1012, 1013, 1015, 1051
P.E. 4410, 4450
MRC 603, SPA, RMA
SFI Mu Insert
AMAT
ULVAC
Novellus
Oerlikon

Other configurations are available upon customer's specs.